Eric Armour

Senior Director of Advanced Process Technology

Vecco Instruments


Eric Armour received his B.S. from University of Pennsylvania in 1987, his M.S. from University of Delaware in 1989, and Ph.D. from University of New Mexico in 1994, all in electrical engineering. He joined Emcore Corporation in 1994, where he collaborated with scientists from Spectrolab and the National Renewable Energy Lab (NREL) to develop the first commercial (large-area production) tandem and triple junction As/P extraterrestrial solar cells grown on Ge using metal-organic vapor phase epitaxy (MOVPE).After this effort, Dr. Armour became the Director of Research for the newly established Emcore Electronic Materials (now IQE-RF), where he led a team to develop an Epitaxial Foundry business concentrating on As/P-based LED, VCSEL, HBT and p-HEMT wafers. These devices are currently used in many commercial products.

Eric was appointed the Director of Materials and Process Development in 2002, leading a cross-functional research team in the development of MOVPE reactor technology and epitaxial growth processes for all III-V compound semiconductor devices. He has continued in this capacity at Veeco Instruments, and is presently the Senior Director of Advanced Process Technology, where he focuses on next-generation GaN reactor platforms. Dr. Armour has contributed to over 100-refereed publications and has 8 US patents.